Ceramics Products
TaC Coated Graphite Heater
For High Temperature Thin Film Deposition Equipment
Momentive Quartz Technologies Inc offers high temperature resistive or inductive heaters with a proprietary coating known as Tantalum Carbide (TaC). With its high temperature stability and high chemical resistance, TaC coated graphite heater provides a more robust heating solution that enhances the life of heaters in harsh environment, reduces equipment maintenance cycle/cost, and increase production yield.
Key Features
- Temperature stability > 2200 °C
- Ultra high purity
- Hard coat with low particle release
- Resistance to H2, NH3, SiH4, CH4
- Resistance to thermal stock
- Stable hot electrical resistance
- Robust electrical contact
- Conformal coating coverage
- Strong adhesive to graphite
- Simple 1D to complex 3D shapes
Potential Applications
- Resistive heating coil
- CVD hot filament
- Inductive heating plate
- Inductive heating cylinder
TaC Coating with High Crystallinity and Excellent Uniformity
IR and Optical Image of TaC Heater at 1100°C
TaC Hot Filament Thermal Cycled to 2000°C at Rate 1000°C/min
| Density (gm/cm3) | Emissivity | CTE (xl0-6/K) | Hardness (HK) | Resistance (Ohm-cm) | Thermal Stability | Etch Rate in NH3(µm/hr) | Etch Rate in H2(µm/hr) | Thickness Variation | |
|---|---|---|---|---|---|---|---|---|---|
|
TaC |
14.3 |
0.3 |
6.3 |
2000 |
1×10-5 |
>2200°C |
0.2 |
0.1 |
-5% |
|
SiC |
3.2 |
0.8 |
4.5 |
2800 |
2×10-3 |
<1600°C |
1.5 |
1.7 |
-10% |
Typical values.
The information provided in these charts is for informational purposes only. It is not a product or material recommendation and it is shared with you on the express condition that you will use your own expertise and professional judgment in applying any information to a specific use case or need. This is general information only, the validity of which may be affected by individual factors that are unknown to Momentive Technologies. It is the responsibility of those using this information to ensure appropriate interpretation and application is undertaken with regards to any specific situation.
Download the product datasheet
